[19p-P02-1~22] 17 Nanocarbon Technology(Poster)

[19p-P02-17] Fabrication of high-Q-factor graphene resonators for mass-detection-based gas sensors

〇Keisuke Emoto¹, Amit Banerjee¹, Ahmed Hammam¹, Manoharan Muruganathan¹, Hisashi Maki^1,2, Yosuke Onda², Masashi Hattori², Kenichi Shimomai², Hiroshi Mizuta^1,3 (1.JAIST, 2.TAIYO YUDEN CO., LTD, 3.Hitachi Cambridge Lab)

Keywords:NEMS, nanoelectronics, graphene

Ammonia emitted from the skin has been found to increase its emission rate due to increased mental and physical stress, and is expected to be applied to simple health monitoring technology. However, the amount of ammonia emitted is a very small change and cannot be detected by the current gas detection method. Therefore, there is an urgent need to develop a compact and highly sensitive gas sensor. In this study, we fabricated a two-layer metal clamping structure device using a graphene resonator.