[19p-Z02-1~10] CS.7 Code-sharing Session of 8.3 & 9.2 & 13.6

[19p-Z02-3] Radical nitridation of silicon by wavelength-mixed
gold nanoparticle plasmons

〇Takeshi Kitajima¹, Machiko Miyake¹, Shouma Kuwata¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:plasma, plasmon, gold nanoparticle

Catalytic reactions using gold nanoparticle plasmons have been utilized in recent years.
We have applied the hot electrons supplied by gold nanoparticles to plasma surface reactions for the formation of high-quality ultrathin oxynitride films.
In the present work, we have focused on the mixed effect of plasmon excitation wavelength and plasma VUV emission, and discovered the effect of green light excitation to promote radical nitridation.