[19p-Z02-1~10] CS.7 Code-sharing Session of 8.3 & 9.2 & 13.6

[19p-Z02-8] EC Properties of WO₃ Films Fabricated by Glancing-angle Sputtering

Yuji Horikoshi¹, Yoshiyuki Nakayama¹, 〇Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol., 2.Kanto-gakuin Univ.)

Keywords:electrochromic, glancing-angle deposition, tungsten trioxide

We fabricated WO₃ films with nano-order gaps by means of radio-frequency magnetron sputtering in a glancing-angle deposition (GLAD) scheme, and investigated influences of the nano-order gaps on electrochromic properties. The GLAD films exhibited crack-like structures induced by an intrinsic tensile stress. The film showed a brilliant electrochromic behavior in the visible range with an excellent response.