[19p-Z04-1~12] 3.4 Biomedical optics

[19p-Z04-1] A study on flexible pulse wave sensor using hydrogenated amorphous silicon film

〇(M1)Shinya Iwasaki¹, Hiroaki Hanafusa¹, Takuma Sato¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

Keywords:hydrogenated amorphous silicon, flexible electronics, photo sensor

Recently, flexible electronics is expected to be applied to wearable devices for biological and medical applications. In this study, we aim to fabricate a bio-attached reflective flexible pulse wave sensor using a green LED emitter and a-Si:H receiver, utilizing the high optical absorption coefficients of hydrogenated amorphous silicon (a-Si:H) and oxidized hemoglobin in blood for green wavelengths. In this paper, we report the formation of low-resistance contacts to a-Si:H films and the estimation of the properties required for the detection of pulse waves.