4:15 PM - 4:30 PM
△ [19p-Z08-12] Study on Lubrication Film Thickness Measurement Method Applying Metal-Insulator-Metal Metamaterial Structure
Keywords:metamaterial, metal-insulator-metal, film thickness measurement
In recent years, the viscosity of lubricating oil has been reduced due to the demand for energy problems, and expectations for ultra-thin film lubrication using adsorption membranes at the molecular level are increasing. In this study, we consider a lubricating film as a dielectric layer in a Metal-Insulator-Metal metamaterial structure, and examine a method for measuring the lubricating film thickness, which regards the thickness change as a resonance wavelength change, by rigorous coupled wave analysis. We will report on the details of the simulation results and the applicability of lubrication film thickness measurement.