The 68th JSAP Spring Meeting 2021

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19p-Z13-1~14] 6.1 Ferroelectric thin films

Fri. Mar 19, 2021 1:30 PM - 5:15 PM Z13 (Z13)

Takeshi Kobayashi(AIST), Seiji Nakashima(Univ. of Hyogo)

2:30 PM - 2:45 PM

[19p-Z13-5] Preparation of Y doped HZO ferroelectric thick films at room temperature by the sputtering method and their electrical and piezoelectric properties

〇(PC)Reijiro Shimura1, Takanori Mimura1, Akinori Tateyama1, Takao Shimizu1,2, Takahisa Shiraishi1, Hiroshi Funakubo1 (1.Tokyo Tech. SMCT, 2.NIMS)

Keywords:HfO2 based ferroelectric film, Piezoelectric film, Thick film