[19p-Z14-1~18] 6.3 Oxide electronics

△ [19p-Z14-6] Epitaxial growth of layered-rock-salt type LiNiO₂

〇Tatsuya Yajima¹, Takuto Soma¹, Akira Ohtomo^1,2 (1.Tokyo Tech, 2.MCES)

Keywords:Layered-rock-salt type structure, LiNiO2, Pulsed laser deposition method

Various studies have been conducted on layered rock salt type LiNiO₂, but there is no report on epitaxial thin film growth. We synthesized this thin film using the PLD method. No diffraction peak caused by the layered structure was observed in as-grown film regardless of the presence or absence of substrate heating during thin film growth. However, a layered structure was formed by annealing in the atmosphere. When the substrate was heated during thin film growth, a peak shift suggesting Li deficiency was observed by post-annealing, indicating that suppression of Li deficiency during thin film growth process is important.