[19p-Z17-1~17] 8.4 Plasma life sciences

[19p-Z17-5] Analysis of reactive species of atmospheric pressure plasma jets by ion measurement

〇Kenkichi Nagato¹, Hirofumi Kurita², Kazunori Takashima² (1.Natl. Inst. Tech. Kochi Col., 2.Toyohashi Univ. Tech.)

Keywords:atmospheric pressure plasma, reactive species, mass spectrometry

We have been conducting ion measurements generated by atmospheric pressure plasmas using mass spectrometry technique to analyze gas phase reactive species and found that a lot of reactive species are involved in ion chemistry in atmospheric pressure plasma jets. We will show the list of reactive species whose information can be obtained by ion measurement. The advantages of analytical method of reactive species generated by atmospheric pressure plasmas using mass spectrometry are also presented.