Kikuo Makita

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 10:00 AM - 11:30 AM A307 (A307)

Symposium (Oral)
| Symposium
| 【Onsite Only】Innovative Properties Brought by Hetero-structure Materials

[20a-A307-1~4] 【Onsite Only】Innovative Properties Brought by Hetero-structure Materials

11:00 AM - 11:30 AM

[20a-A307-4] Development of Heterogeneous Bonding Technology using Smart Stack

〇Kikuo Makita¹, Hidenori Mizuno¹, Yukiko Kamikawa¹, Ryuji Oshima¹, Yasushi Shoji¹, Shogo Ishizuka¹, Takeyoshi Sugaya¹ (1.AIST)