Yuki Murata

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:15 AM - 12:15 PM C101 (C101)

Oral presentation
| CS Code-sharing session
| 【CS.5】 Code-sharing Session of 3.10 & 3.12

[22a-C101-1~11] CS.5 Code-sharing Session of 3.10 & 3.12

9:15 AM - 9:30 AM

△ [22a-C101-1] Design and fabrication of Si₃N₄ metasurface phaser towards InGaN-based circularly polarized optical devices

〇Yuki Murata¹, Shintaro Toda^3,1, Yasuhumi Fujiwara¹, Nakagawa Takashi¹, Shuhei Ichikawa^1,2 (1.Graduate School of Engineering, Osaka Univ., 2.Research Center for UHVEM, Osaka Univ., 3.ULVAC Inc.)