Masaru Hori

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 5:30 PM B104 (B104)

Symposium (Oral)
| Symposium
| Semiconductor Manufacturing and Process Technologies for Green Transformation

[21p-B104-1~8] Semiconductor Manufacturing and Process Technologies for Green Transformation

2:10 PM - 2:40 PM

[21p-B104-3] Strategic Challenges for Green Innovation in Wafer Processing

〇Masaru Hori¹, Makoto Sekine¹, Kenji Ishikawa¹ (1.Nagoya Univ.)