Kota Hasegawa

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:30 PM - 7:00 PM B103 (B103)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[20p-B103-1~19] 6.1 Ferroelectric thin films

3:15 PM - 3:30 PM

[20p-B103-7] Study on oxygen impurity in (Al,Sc)N thin films fabricated by sputtering technique

〇Kota Hasegawa^1,2, Takao Shimizu², Takeo Ohsawa², Isao Sakaguchi^1,2, Naoki Ohashi^1,2,3 (1.Kyushu Univ., 2.NIMS, 3.Tokyo tech)