Kaname Imokawa

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 12:15 PM C105 (C105)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[21a-C105-1~12] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:30 AM - 11:45 AM

[21a-C105-10] Resistivity reduction of fine metal line by KrF excimer laser annealing

Yasutsugu Usami¹, 〇Kaname Imokawa¹, Ryoichi Nohdomi¹, Kouji Kakizaki¹, Hakaru Mizoguchi¹ (1.Gigaphoton Inc.)

Thu. Sep 22, 2022 9:00 AM - 12:00 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[22a-B204-1~11] 13.7 Compound and power devices, process technology and characterization

11:00 AM - 11:15 AM

[22a-B204-8] Nitrogen Doping for SiC Substrate by KrF Excimer Laser
Study of Laser Doping Mechanism (part 4)

〇Kaname Imokawa¹, Ryoichi Nohdomi¹, Yasutsugu Usami¹ (1.Gigaphoton Inc.)