Hidetaka Shimawaki

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:30 PM - 2:45 PM C306 (C306)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[21p-C306-1~5] 7.2 Applications and technologies of electron beams

2:15 PM - 2:30 PM

[21p-C306-4] Electron Emission from Planar-type Electron Source based on Nanocrystalline Silicon under Rough Vacuum

〇Hidetaka Shimawaki¹, Masayoshi Nagao², Katsuhisa Murakami² (1.Hachinohe Inst.Tech., 2.AIST)