Toru Takeya

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:45 PM - 4:00 PM

△ [22p-A406-11] Investigation of Bonding State of Fluorocarbon Films and Its Properties

〇Toru Takeya¹, Okada Takeru¹ (1.Grad. Sch. Eng. Tohoku Univ.)