jumpei kito

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:00 AM - 11:45 AM B101 (B101)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[23a-B101-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:00 AM - 10:15 AM

△ [23a-B101-5] TiN Film Formed by DC-Filtered Arc Deposition with Anode Acting as Droplet Filter

〇jumpei kito¹, yuki hashimoto¹, yoshinori saiki¹, takahiro bando¹, toru harigai¹, hirohumi takikawa¹, hiroki gima² (1.Toyohashi Univ. Technol., 2.OSG Coating Service)

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