Takuma Kawaguchi

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 12:00 PM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21a-B203-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:15 AM - 11:30 AM

[21a-B203-9] Characterization of Nitrogen-doped SnO_x Thin Films Deposited by Sputtering in Ar/N₂

〇(M1)Takuma Kawaguchi¹, Kotaro Watanabe¹, Tomohiro Yamaguchi¹, Takeyoshi Onuma¹, Tohru Honda¹, Shinya Aikawa¹ (1.Kogakuin Univ.)