Kazushi Masuda

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20p-A105-1~11] 8.1 Plasma production and diagnostics

2:30 PM - 2:45 PM

[20p-A105-3] Measurement of spatial distribution of hydrogen atom above SUS stage in inductively coupled remote H₂ plasma with vacuum ultraviolet absorption spectroscopy

〇(M2)Kazushi Masuda¹, Keigo Takeda¹, Mineo Hiramatsu¹ (1.Meijo Univ.)