Kosei Kubota

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 1:00 PM - 5:00 PM A406 (A406)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[22p-A406-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:00 PM - 2:15 PM

[22p-A406-5] Etching characteristics of GaN in Fluorocarbon plasmas

〇Kosei Kubota¹, Kazuo Takahashi¹ (1.KIT)