Miharu Niimoto

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 2:00 PM - 5:00 PM A105 (A105)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[20p-A105-1~11] 8.1 Plasma production and diagnostics

2:15 PM - 2:30 PM

△ [20p-A105-2] Passive monitoring of specific particle species in 860 MHz surface wave plasma for plasma CVD/ALD

〇Miharu Niimoto¹, Akio Sanpei¹, Haruhiko Himura¹, Takaya Ninomiya¹, Shinichiro Inagaki¹ (1.KIT)