Tomoya Tsutsumi

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:30 PM - 7:00 PM B103 (B103)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[20p-B103-1~19] 6.1 Ferroelectric thin films

3:45 PM - 4:00 PM

[20p-B103-9] Evaluation of the effect of plasma oxidation on AlScN / Si by AR-HAXPES

〇Tomoya Tsutsumi¹, Gen Nakada¹, Yoshiharu Kirihara¹, Tatsuki Okazaki², Akira Yasui³, Kuniyuki Kakushima⁴, Yuichiro Mitani^1,2, Hiroshi Nohira¹ (1.Tokyo City Univ., 2.Adv.Res.Lab., Tokyo City Univ., 3.JASRI, 4.Tokyo tech.)

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