[20a-A101-1~11] 3.10 フォトニック構造・現象（旧3.11）

▲ [20a-A101-9] Experimental investigation of two-layered SiC photonic crystals with a complete photonic bandgap

〇(PC)Heungjoon Kim¹、Bong-Shik Song^1,2、Takashi Asano¹、Susumu Noda¹ (1.Kyoto Univ.、2.Sungkyunkwan Univ.)

キーワード：SiC photonic crystals, Complete photonic bandgap

We report on the experimental investigation of a two-layered SiC photonic crystal (PC) with a complete photonic band gap (PBG), which consists of triangular lattice rod- and hole-type PC layers. We successfully fabricated the two-layered SiC PC structure in a thin SiC film by using positioning-alignment e-beam lithography and two-step plasma etching, and we measured the transmission spectra for TE and TM input light along Γ-J direction. The transmission dip for TE (TM) input light are shown in a wavelength range between 824 nm and 915 nm (817 nm and 911 nm) because of PBG for each polarization. Furthermore, the overlap range of both transmission dips for each polarization is ~ 87 nm, which indicates a common PBG range for Γ-J direction. Details including comparison between the experimental and theoretical results will be presented at the conference.