[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-8] Four-terminal poly-Si TFTs with high-k gate dielectric on glass substrates and their application in CMOS inverter

〇Akihisa Nagayoshi¹, Kaisei Nomura¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:Semiconductor, Silicon, CMOS