[20a-B103-1~12] 6.1 強誘電体薄膜

▲ [20a-B103-1] Dielectric Properties of Ba_xSr_1−xTiO₃ (x = 0.5) Epilayer Transferred on PET Substrate

〇(M2)RUI YU¹、Lizhikun Gong¹、Hiromichi Ohta²、Tsukasa Katayama^2,3 (1.IST- Hokkaido Univ、2.RIES-Hokkaido Univ、3.JST-PRESTO)

キーワード：dielectric constant, film, sacrificial layer

Dielectric materials show useful characteristics and have been widely applied for industrial applications such as capacitors, antennas, and sensors. Ba_xSr_1−xTiO₃ (BST) is one of the most applied dielectric materials due to its high permittivity (ε_r) and large tunability (ε(E = 0)/ε(E)). These properties as well as the Curie temperature can be controlled by changing the Ba/Sr ratio x. At the last conference, we reported that BST (x = 0.25) epilayer on SrTiO₃ substrate was successfully transferred on PET substrate using the peel-off and transfer method. In this study, we show the preparation and dielectric properties of BST (x = 0.5) epilayer transferred on PET substrate.