[20a-C202-1~11] 15.7 Crystal characterization, impurities and crystal defects

[20a-C202-4] Observation of Dislocation in Ge Single Crystal Substrates by X-ray Topography Using the Superbolman Effect

〇Yusuke Ito¹, Kenta Takatsu¹, Yoshiyuki Tsusaka¹, Jyunji Matsui² (1.Univ. of Hyogo, 2.Nano-Tech.Lab)

Keywords:X-ray, Topography