10:15 AM - 10:30 AM
[20a-C202-6] X-ray topographic observation of defect structure in ScAlMgO4 cross-section wafer
Keywords:X-ray topography, Crystal material, Defect structure
To understand the unique defect structure of ScAlMgO4(SAM) crystal, the defect structure of SAM cross-section wafer including the early and late-growth stages was observed using synchrotron X-ray topography. In the early-growth stage, the thermal strain was large and straight-type dislocations with high density occurred. On the other hand, the stream-type dislocations with low density were observed only in the late-growth stage. The thermal strain must have become smaller in the late-growth stage. It was found that the dislocation generation was closely related to the thermal strain at the solid-liquid interface in the crystal growth.