The 83rd JSAP Autumn Meeting 2022

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[20a-C302-1~9] 6.4 Thin films and New materials

Tue. Sep 20, 2022 9:00 AM - 11:30 AM C302 (C302)

Kohei Fujiwara(Tohoku Univ.)

9:00 AM - 9:15 AM

[20a-C302-1] Properties of Hf thin films sputtered in different gas species

〇Kazuhisa Suzuki1, Midori Kawamura1, Takayuki Kiba1, Yoshio Abe1 (1.Kitami Inst. of Tech.)

Keywords:Hf thin film, Kr gas, Electrical resistivity