The 83rd JSAP Autumn Meeting 2022

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[20a-C302-1~9] 6.4 Thin films and New materials

Tue. Sep 20, 2022 9:00 AM - 11:30 AM C302 (C302)

Kohei Fujiwara(Tohoku Univ.)

10:15 AM - 10:30 AM

[20a-C302-5] Formation of TiO2-VO2 multilayer films on glass substrates via spinodal decomposition

〇Yuji Muraoka1, Tadakuni Takeda2, Takanori Wakita1, Takayoshi Yokoya1, Yoshito Takemoto2 (1.Okayama Univ. RIIS, 2.Okayama Univ.)

Keywords:Spinodal decomposition, TiO2-VO2 film, Glass substrate

TiO2-VO2 multilayer films on glass substrates were prepared using spinodal decomposition. First, (Ti0.3V0.7) O2 solid solution films were grown on quartz glass substrates, and then were annealed to induce the spinodal decomposition. By the results of X-ray diffraction (XRD), transmission electron microscope observation, and electrical resistance measurement of the annealed sample, it was found that TiO2-VO2 multilayer films on glass substrates were obtained using spinodal decomposition. Details of the experimental results will be presented in the presentation.