The 83rd JSAP Autumn Meeting 2022

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Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

[20a-P01-1~5] 1.3 Novel technologies and interdisciplinary engineering

Tue. Sep 20, 2022 9:30 AM - 11:30 AM P01 (Arena)

9:30 AM - 11:30 AM

[20a-P01-1] Fundamental Study on Ultra-High Frequency Dual-Channel Wireless QCM Fabrication Using Si Anisotropic Etching

〇Junki Shinohara1, Manabu Yoshino1, Fumihito Kato1 (1.Nippon Inst.of Tech.)

Keywords:Quartz crystal microbalance, Ultra-high frequency, Dual-channel