Improvement of UVC sensitivity of fluorescence enhanced Si-PD by surface treatment

Ami Hitomi; Toru Katsumata; Hiroaki Aizawa

Presentation information

Oral presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.5 Instrumentation, measurement and Metrology

[20p-A301-1~13] 1.5 Instrumentation, measurement and Metrology

Tue. Sep 20, 2022 1:15 PM - 4:45 PM A301 (A301)

Nao Terasaki(AIST)

3:30 PM - 3:45 PM

[20p-A301-9] Improvement of UVC sensitivity of fluorescence enhanced Si-PD by surface treatment

〇(M1)Ami Hitomi¹, Toru Katsumata^1,2, Hiroaki Aizawa¹ (1.Toyo Univ., 2.Toyo Inst.)

Keywords:UVC sensor, Photoluminescence, Surface

Highly sensitive sensor for UVC light was developed using a fluorescence enhanced photodiode (FE-PD) that combines Si-PD for visible and near-infrared light with a phosphor. Fluorescent aclylic resin was found that UVC can be detected with high sensitivity by processing the surface of the phosphor used in the FE-PD.