Improvement of crystallinity and flatness of Al-polar and N-polar AlN using visinal sapphire substrates and polarity inversion

Ryo Okuno; Wataru Mastumura; Kouki Hanasaku; Taketo Kowaki; Minagi Miyamoto; Kai Fujii; Satoshi Kurai; Narihito Okada; Yongzhao Yao; Yukari Ishikawa; Youichi Yamada

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[20p-B201-1~16] 15.4 III-V-group nitride crystals

Tue. Sep 20, 2022 1:30 PM - 6:00 PM B201 (B201)

Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo), Yusuke Hayashi(Osaka Univ.)

5:15 PM - 5:30 PM

[20p-B201-14] Improvement of crystallinity and flatness of Al-polar and N-polar AlN using visinal sapphire substrates and polarity inversion

〇Ryo Okuno¹, Wataru Mastumura¹, Kouki Hanasaku¹, Taketo Kowaki¹, Minagi Miyamoto¹, Kai Fujii¹, Satoshi Kurai¹, Narihito Okada¹, Yongzhao Yao², Yukari Ishikawa², Youichi Yamada¹ (1.Grad. School of Sci. & Tech. for Inovastion, Yamaguchi Univ., 2.JFCC)

Keywords:AlN, tiny pits

« Previous in this session
Next in this session »

▲