The 83rd JSAP Autumn Meeting 2022

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[20p-B201-1~16] 15.4 III-V-group nitride crystals

Tue. Sep 20, 2022 1:30 PM - 6:00 PM B201 (B201)

Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo), Yusuke Hayashi(Osaka Univ.)

3:45 PM - 4:00 PM

[20p-B201-9] Sputtering Temperature Dependence on Crystallinity of a-plane AlN Fabricated by Sputtering and Annealing

〇(M1)Yuki Ogawa1, Kota Shibutani1, Kenjiro Uesugi2,3, Shiyu Xiao1, Kanako Shojiki1, Hideto Miyake1 (1.Grad. Sch. of Eng. Mie Univ., 2.MRPCO, 3.Grad. Sch. of RIS.)

Keywords:Sputter, a-plane AlN, r-sapphire substrate