The 83rd JSAP Autumn Meeting 2022

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[20p-C101-1~17] 16.3 Bulk, thin-film and other silicon-based solar cells

Tue. Sep 20, 2022 1:30 PM - 6:15 PM C101 (C101)

Hitoshi Sai(AIST), Shinsuke Miyajima(Tokyo Tech), Atsushi Masuda(Niigata Univ.)

2:45 PM - 3:00 PM

[20p-C101-6] Evaluation of TOPCon structure fabricated by sputtering and ion implantation

〇(D)Noboru Yamaguchi1,2, Shinsuke Miyajima1 (1.Tokyo Tech., 2.ULVAC, Inc.)

Keywords:sputtering, ion implantation, TOPCon