[20p-C106-1~13] 12.1 Fabrications and Structure Controls

[20p-C106-1] [Molecular Electronics and Bioelectronics Division Award Speech] Preparation of Polymer Thin Films by Physical Vapor Deposition

〇Hiroaki Usui¹ (1.Tokyo Univ. Agricul. & Technol.)

Keywords:polymer thin films, deposition polymerization, physical vapor deposition

A review is given regarding physical vapor deposition of polymer thin films with an emphasis on our original techniques including ionization-assisted deposition of oligomers, electron or ion assisted radical deposition polymerization, and surface-initiated deposition polymerization that initiates polymerization by reactive self-assembled monolayers. The outcome enabled by these techniques include interfacial control, formation of functionally-graded films, and construction of polymer multilayers.