[20p-P05-1~3] 15.6 Group IV Compound Semiconductors (SiC)

[20p-P05-2] 3C-SiC wire grown on metal catalysts using monomethylsilane

〇(M2)Yu Shikata¹, Daisuke Kameyama¹, Takao Oto¹, Atsushi Saito¹, Yuzuru Narita¹ (1.Yamagata Univ.)

Keywords:3C-SiC