[21a-A306-1~9] 3.6 Laser processing (formerly 3.7)

[21a-A306-1] High-Speed Observation of the Generation Process of Surface Microstructures in Nanosecond Laser Processing of Copper

〇Kazuya Matsuda¹, Keisuke Nagato¹, Yusuke Ito¹, Hiroaki Suzuki¹, Liwei Chen¹, Junya Hattori¹, Naohiko Sugita¹, Masayuki Nakao¹ (1.Univ. Tokyo)

Keywords:laser processing, pulsed laser deposition method, high-speed observation

Nanosecond laser processing has been used for a wide range of applications such as metal drilling, fine particle generation, and surface micromachining due to its precision and high processing efficiency. In order to achieve more efficient particle generation and microfabrication, it is necessary to clarify the fundamental processes of laser ablation. In this study, the mechanism of microstructure formation was investigated by pump and probe observation using a femtosecond laser as a laser for observation, observation of spontaneous light from a plume, and static observation of the microstructure after processing.