The 83rd JSAP Autumn Meeting 2022

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3 Optics and Photonics » 3.6 Laser processing (formerly 3.7)

[21a-A306-1~9] 3.6 Laser processing (formerly 3.7)

Wed. Sep 21, 2022 9:00 AM - 11:30 AM A306 (A306)

Shuntaro Tani(Univ. of Tokyo), Yusuke Ito(Univ. Tokyo)

11:15 AM - 11:30 AM

[21a-A306-9] Development of a stripping technique using laser irradiation and ozonated water

〇(M1)Tomoya Nakao1, Atushi Koizumi1, Ryohei Yasukuni1, Tomosumi Kamimura1, Masashi Yoshimura2, Hideo Horibe3 (1.Osaka Institute of Tech., 2.ILE, Osaka University, 3.osaka metropolitan university)

Keywords:resist peeling, lithography