[21a-B200-1~2] 8.8 Plasma Electronics Division Award Speech

[21a-B200-2] [Plasma Electronics Award Speech] Diagnostics of electron temperature and density of atmospheric-pressure non-equilibrium Ar plasma by continuum emission measurement

Hiroshi Onishi¹, Fuminori Yamazaki¹, Yoshiro Hakozaki¹, Masaki Takemura¹, Atsushi Nezu¹, 〇Hiroshi Akatsuka¹ (1.Tokyo Tech.)

Keywords:atmospheric-pressure non-equilibrium plasma, continuum spectrum, optical emission spectroscopy measurement

The feasibility of spectroscopic measurement of electron temperature and density of atmospheric-pressure non-equilibrium argon plasma was investigated, applying optical emission spectroscopic measurement of a continuum spectrum due to electron-atom bremsstrahlung. Emission spectroscopy was performed with an absolutely calibrated measurement system using a discharge device that can limit the discharge space to one point. The obtained spectrum is fitted with a theoretical curve. Assuming the Druyvesteyn electron energy distribution function, appropriate electron temperature and density were derived. The validity was confirmed by the cross-check between the line spectral intensity and the excited state density calculated with the Ar collisional radiative model with atomic collisional processes.