[21a-B203-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21a-B203-1] Synthesis of Zinc Oxide Thin Film by Using IR Laser Deposition

〇Tatsuya Masuda¹, Takuro Dazai^1,2, Toshihiro Sato³, Norihiko Sekine⁴, Iwao Hosako⁴, Ryota Takahashi², Hideomi Koinuma¹ (1.SCT, 2.Nihon Univ., 3.Vacuum Products, 4.NICT)

Keywords:Zinc oxide, IR Laser, Thin film