[21a-B203-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21a-B203-11] QCM Sensor Application of Zinc Oxide Thin Films Prepared by Mist CVD Method

〇Takumi Kimura¹, Toshiki Kitamura¹, Yujji Nakabayashi², Satoru Yamada¹ (1.NIT, Ishikawa, 2.JAIST)

Keywords:mist CVD, QCM, ZnO