The 83rd JSAP Autumn Meeting 2022

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[21a-P01-1~16] 6.2 Carbon-based thin films

Wed. Sep 21, 2022 9:30 AM - 11:30 AM P01 (Arena)

9:30 AM - 11:30 AM

[21a-P01-16] Design of infrared band-rejection filter by PIG-PECVD deposited a-C:H films

Yusuke Kondo1, Naomi Matsumura1 (1.ORIST)

Keywords:PIG-PECVD, a-C:H, optical thin film