The 83rd JSAP Autumn Meeting 2022

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[21a-P01-1~16] 6.2 Carbon-based thin films

Wed. Sep 21, 2022 9:30 AM - 11:30 AM P01 (Arena)

9:30 AM - 11:30 AM

[21a-P01-7] Dependence on Atomic Hydrogen Exposure for Hydrogen-Free Diamond-like Carbon Films

Yuichi Haruyama1, Daiki Morimoto1, Akira Heya2, Koji Sumitomo2, Noriaki Toyoda2, Seigo Ito2 (1.LASTI, Univ. Hyogo, 2.Eng, Univ. Hyogo)

Keywords:diamond-like carbon, atomic hydrogen exposure

The effect on the atomic hydrogen exposure in the hydrogenated diamond-like carbon (DLC) films has been investigated in our group. Since the systematic investigation of atomic hydrogen exposure on the DLC films is important, the effect of atomic hydrogen exposure on the hydrogen-free DLC films was investigated by a photoelectron spectroscopy.
Although a peak in the C 1s core-level photoelectron spectrum of the hydrogen-free DLC film was located at ~284.4 eV before atomic hydrogen exposure, it shifted at ~285.2 eV after atomic hydrogen exposure. This indicates that the contents of the sp3 hybridized carbon atoms increased remarkably after atomic hydrogen exposure. In the presentation, we will discuss the details of the atomic hydrogen exposure effect on hydrogen-free DLC films.