[21a-P01-1~16] 6.2 Carbon-based thin films

[21a-P01-7] Dependence on Atomic Hydrogen Exposure for Hydrogen-Free Diamond-like Carbon Films

〇Yuichi Haruyama¹, Daiki Morimoto¹, Akira Heya², Koji Sumitomo², Noriaki Toyoda², Seigo Ito² (1.LASTI, Univ. Hyogo, 2.Eng, Univ. Hyogo)

Keywords:diamond-like carbon, atomic hydrogen exposure

The effect on the atomic hydrogen exposure in the hydrogenated diamond-like carbon (DLC) films has been investigated in our group. Since the systematic investigation of atomic hydrogen exposure on the DLC films is important, the effect of atomic hydrogen exposure on the hydrogen-free DLC films was investigated by a photoelectron spectroscopy.
Although a peak in the C 1s core-level photoelectron spectrum of the hydrogen-free DLC film was located at ~284.4 eV before atomic hydrogen exposure, it shifted at ~285.2 eV after atomic hydrogen exposure. This indicates that the contents of the sp³ hybridized carbon atoms increased remarkably after atomic hydrogen exposure. In the presentation, we will discuss the details of the atomic hydrogen exposure effect on hydrogen-free DLC films.