[21a-P02-1~50] 10 Spintronics and Magnetics(Poster)

▲ [21a-P02-19] Fabrication and evaluation of Ni₇₈Fe₂₂ thin films on polycarbonate for flexible magnetic sensors

〇Yuri Ohashi¹, Yu Matsushima¹, Hideo Kaiju^1,2 (1.Keio Univ., 2.CSRN, Keio Univ.)

Keywords:flexible magnetic sensor, magnetic thin films, anisotropic magnetoresistance

In recent years, flexible magnetic sensors have attracted much attention as next-generation sensors with features such as flexibility and reversibility. It has been reported that the magnetic properties of magnetic thin films change by bending. So far, the anisotropic magnetoresistance (AMR) has been investigated for magnetic thin films on various organic films such as polyethylene naphthalate (PEN) and polyethylene terephthalate (PET). The surface roughness of polycarbonate (PC) is very small at less than 1.0 nm. The flat surface could form single magnetic domain structures. PC substrates also have high thermal and mechanical durability. Therefore, magnetic thin films using PC substrates are suitable for flexible magnetic sensors. In this study, we investigate the surface and interface structures of Ni₇₈Fe₂₂ thin films on PC and clarify the influence of flexibility on the AMR effect.