9:30 AM - 11:30 AM
[21a-P02-29] Preparation and ferromagnetic resonance evaluation of Pt(O) films
Keywords:spin Hall angle, spin-orbit torque, ferromagnetic resonance
Recently, spin-orbit torque (SOT) based memories (SOT-MRAM) and devices have been proposed, and the development of materials with large SOT is desired to improve their properties. We have succeeded in significantly improving the θSH of Pt implanted with S ions by ion implantation . In this study, we focused on oxygen as an element that can be used in sputtering. We report on the preparation of oxygen-doped Pt (Pt(O)) by ion implantation and sputtering, and the ferromagnetic resonance evaluation of both devices.