The 83rd JSAP Autumn Meeting 2022

Presentation information

Oral presentation

3 Optics and Photonics » 3.10 Photonic structures and phenomena (formerly 3.11)

[21p-A101-1~16] 3.10 Photonic structures and phenomena (formerly 3.11)

Wed. Sep 21, 2022 1:15 PM - 5:45 PM A101 (A101)

Kenji Ishizaki(Kyoto Univ.), Akihiko Shinya(NTT), Kyoko Kitamura(Kyoto Inst. of Tech.)

2:00 PM - 2:15 PM

[21p-A101-4] Investigation on the high productive fabrication of high brightness PCSEL

Wataru Kunishi1,2, Miyai Eiji1,2, Menaka De Zoysa1, Kenji Ishizaki1, Masahiro Yoshida1, Susumu Noda1 (1.Kyoto Univ., 2.ROHM Co., Ltd.)

Keywords:Laser diode, LiDAR, Surface emission

We fabricated Photonic Crystal Surface Emitting Laser (PCSEL) by high productive process of NIL. This NIL is processed in the following order.
1. Fabrication of master mold
2. Fabrication of replica mold
3. Imprinting to the resin coated on GaAs wafer
4. Elimination of the remaining resin
5. Dry etching of GaAs wafer
In this report we adjusted these processes carefully. As a result we have successfully fabricated the photonic crystal pattern which is as precise as the one fabricated by EB lithography. Furthermore, the PCSEL fabricated by NIL and the one fabricated by EB lithography operates pretty much equally.