The 83rd JSAP Autumn Meeting 2022

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9 Applied Materials Science » 9.3 Nanoelectronics

[21p-A102-1~10] 9.3 Nanoelectronics

Wed. Sep 21, 2022 1:00 PM - 3:45 PM A102 (A102)

Yoshinao Mizugaki(UEC), Takahide Oya(Yokohama Natl. Univ.)

1:30 PM - 1:45 PM

[21p-A102-3] Correlation between Nanostructure and Electrical Characteristics in Nano-convex embedded Si MOSFET

〇Takuma Mitsuya1, Shintaro Mizuno1, Seiya Kasai1 (1.RCIQE,Hokkaido Univ.)

Keywords:semiconductor