[21p-A306-1~16] 11.4 Analog applications and their related technologies

△ [21p-A306-7] Superconducting thin-film resonator with an ultra-high quality factor

〇(M2)Ryosuke Murayama^1,4, Satoru Mima^2,4, Takashi Noguchi^3,4, Tohru Taino^1,4, Chiko Otani^4,5 (1.Saitama Univ., 2.NICT, 3.NAOJ, 4.RIKEN, 5.Tohoku Univ.)

Keywords:microwave kinetic inductance detector, thin-film resonator, superconductor

The thin-film superconducting resonator used in the microwave kinetic inductance detector provides a resonance Q value of approximately 10⁵-10⁶. However, it has never been able to achieve a very high resonance Q value (up to about 10¹⁰) like the cavity resonators of bulk superconductors used in particle accelerators. A possible cause is loss due to a dielectric including a substrate interposed between the signal conductor and the ground conductor of the transmission line constituting the thin film resonator. In order to reduce the loss, we propose a new structure, and report on its fabrication and measurement results.