The 83rd JSAP Autumn Meeting 2022

Presentation information

Print

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[21p-C105-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Wed. Sep 21, 2022 1:30 PM - 4:30 PM C105 (C105)

Takeaki Yajima(Kyushu Univ.), Takahiro Mori(AIST)

3:15 PM - 3:30 PM

[21p-C105-7] Hetero-oriented Ge complementary FET (CFET) through layer transfer technology

〇WENHSIN CHANG1, X. R. Yu2,3, W. F. Wu2, Y. J. Lee2, Y. H. Wang3, Tatsuro Maeda1 (1.AIST, 2.TSRI, 3.NCKU)

Keywords:CFET, Layer transfer technology, Ge