[21p-C106-1~11] 6.5 Surface Physics, Vacuum

△ [21p-C106-5] Study of evaluation of the initial state of damage to the glass surface

〇(M1)Asato Yamaguchi¹, Hiroshi Murotani¹ (1.Tokai Univ)

Keywords:weathering, nanoindentation

When optical thin films are deposited on glass substrates that have minute burns that are not visible to the naked eye, the deposited films become unevenly colored or cloudy. The presence of minute flaking is difficult to detect and may not be noticed until after the film has been deposited. In this study, we will investigate a method to evaluate the presence of micro flaking in a way that does not affect the appearance of the substrate, assuming that the method is applied to glass substrates before deposition, and finally, we will investigate the effect on the structure of the deposited film.